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Publications [#60187] of Peter K. Haff
Papers Published
- Haff, P.K. and Switkowski, Z.E., On the sputtering of binary compounds,
Appl. Phys. Lett. (USA), vol. 29 no. 9
(1976),
pp. 549 - 51 [1.89180]
(last updated on 2007/04/10)
Abstract: A model is proposed to relate the partial sputtering yields on binary systems to the elementary sputtering rates, the stoichiometric concentrations and surface binding energy. The dependence of the yields on the bulk target concentrations is shown to be nonlinear. Data for sputtering of PtSi, NiSi, and Cu3Au are in promising agreement with theoretical predictions
Keywords: copper alloys;gold alloys;nickel alloys;platinum alloys;silicon alloys;sputtering;
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