- Carter-Coman, Carrie and Bicknell-Tassius, Robert and Brown, April S. and Jokerst, Nan Marie, Compliant substrates for reduction of strain relief in mismatched overlayers,
Materials Research Society Symposium - Proceedings, vol. 441
pp. 361 - 366 .
(last updated on 2007/04/14)
Thin film compliant substrates can be used to extend the critical thickness in mismatched overlayers. A metastability model has been coupled with recent experimental strain relief data to determine the critical thickness of InGaAs epilayers grown on GaAs compliant substrates of variable thickness. The results of this model are also compared to other compliant substrate critical thickness models.
Thin films;Mathematical models;Strain;Semiconducting indium compounds;Semiconducting gallium arsenide;Thickness measurement;Stress relief;