- Seo, S.W. and Shen, J.J. and Jokerst, N.M. and Brown, A.S., Large area, high speed InGaAs thin film MSMs for heterogeneously integrated optoelectronics,
OSA Trends in Optics and Photonics Series, vol. 88
pp. 460 - 463 .
(last updated on 2007/04/14)
Thin film InGaAs photodetectors for heterogeneously integrated optoelectronics are demonstrated with low dark current (0.16nA at 5V), and high speed (3ps rise time, 6.3ps FWHM), large area (40 μm), and good responsivity (0.19A/W at 5V).
Optoelectronic devices;Thin films;Fiber optics;Electrodes;Indium compounds;Gallium compounds;Diaphragms;Quantum efficiency;Metallizing;Degradation;