- Shen, Jeng-Jung and Jokerst, Nan Marie and Brown, April S., Compliant substrate strain modulated epitaxy for WDM laser arrays,
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1
pp. 95 - 96 .
(last updated on 2007/04/14)
A new method for making a multiple-wavelength laser array by using strain modulated epitaxy is described. This growth process, which enables growth on a smooth substrate surface while enabling three dimensional band structure engineering, uses a bottom-patterned compliant substrate to modulate the strain variation on the epitaxial layer grown on the compliant substrate. To achieve the strain variation as a function of lateral position on the grown sample, a bottom patterned compliant substrate is used to vary the strain. A mathematical model has been developed for the realization of a multiple wavelength laser array using bottom patterned compliant substrates.
Wavelength division multiplexing;Epitaxial growth;Mathematical models;Substrates;Energy gap;Strain;Semiconductor device manufacture;