- Shen, Jeng-Jung and Brown, April S. and Wang, Yongqian and Wang, Zhong L., Self-assembled quantum dot transformations via anion exchange,
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 19 no. 4
pp. 1463 - 1466 [1.1385916] .
(last updated on 2007/04/14)
Anion anneals have different effects on the quantum dot size distributions and vertical self-assembly. Phosphorus anneal at 300°C can enhance the uniformity of the dot size distribution for both 2 and 3 ML multilayer structures. TEM shows vertically aligned dots structure after annealing at 300°C and a relaxed structure after annealing at 350°C. Arsenic anneal increases the dot size, decreases the dots density, and decreases the uniformity of quantum dots distribution.
Self assembly;Negative ions;Ion exchange;Annealing;Composition;Surface treatment;Nucleation;Temperature;Morphology;