- Brown, April S. and Losurdo, Maria and Bruno, Giovanni and Brown, Terence and May, Gary, Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions,
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22 no. 4
pp. 2244 - 2249 [1.1775201] .
(last updated on 2007/04/14)
As/Sb and Sb/As anion exchange reactions to control heterojunction interface intermixing in mixed anion structure were investigated. The substrate temperature, anion flux exposure time, and incident anion molecular species were analyzed. The characterization of Sb/AS structures was done by Sb surface segregation and subsequent incorporate in epitaxial overlayers. The result show that As/Sb exchange was significant and enhanced by the use of dimer fluxes.
Arsenic;Antimony;Reaction kinetics;Heterojunctions;Semiconducting gallium compounds;Dimers;Molecular structure;Molecular beam epitaxy;Synthesis (chemical);Scanning tunneling microscopy;X ray photoelectron spectroscopy;Mathematical models;