- Brown, April S. and Doolittle, W. Alan, Status and promise of compliant substrate technology,
Applied Surface Science, vol. 166 no. 1
pp. 392 - 398 [S0169-4332(00)00455-4] .
(last updated on 2007/04/14)
Compliant substrates offer significant promise as a new approach for strain management in semiconductors. The primary application is to produce device-quality highly mismatched materials on dissimilar substrates. Various implementations and processes for achieving substrate compliancy have been proposed and demonstrated. These include the use of twist-, glass-, and metal-bonds, and the use of engineered templates realized with laterally oxidized Al-containing alloys. A recent focus in our work has been on the growth of GaN on a novel and easily removable substrate - lithium gallate - for regrowth on a bonded GaN template.
Semiconducting glass;Semiconducting gallium compounds;Semiconductor growth;Chemical bonds;