Papers Published

1. Ramachandran, S. and Brady, D.J. and Bishop, S.G., Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1 (1996), pp. 284 - 285 [LEOS.1996.565242] .
   (last updated on 2007/04/11)

   Abstract:
   The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As₂S₃ (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.

   Keywords:
   Optical glass;Laser recording;Light absorption;Photolithography;Integrated circuit manufacture;Laser beam effects;Gas lasers;Expansion;