Papers Published

1. Zou, Jun and Byrne, Colin and Liu, Chang and Brady, David, Optical properties of micromachined polysilicon reflective surfaces with etching holes, Proceedings of SPIE - The International Society for Optical Engineering, vol. 3511 (1998), pp. 307 - 314 [12.324315] .
   (last updated on 2007/04/11)

   Abstract:
   MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

   Keywords:
   Micromachining;Polysilicon;Reflection;Surface roughness;Etching;Integrated circuits;Laser beams;Diffraction;Optimization;Optical systems;Microoptics;