Papers Published
Abstract:
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10(-4) to 10(-1) Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr(-1). Ion currents in excess of 1 mu A were generated. (c) 2007 American Institute of Physics.