Papers Published
Abstract:
A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm-long enable fully-integrated sensors with index sensitivities near 3×10 -6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).
Keywords:
Chemical sensors;Biosensors;Optical sensors;Silicon;CMOS integrated circuits;Waveguides;Interferometry;Refractive index;Signal processing;Signal to noise ratio;Ellipsometry;Calibration;Modal analysis;Computer simulation;