Papers Published
Abstract:
A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm enable fully-integrated sensors with index sensitivities near 3×10-6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv)
Keywords:
chemical sensors;CMOS integrated circuits;elemental semiconductors;Mach-Zehnder interferometers;optical planar waveguides;optical sensors;silicon;