Publications [#66565] of Nan M. Jokerst

Papers Published

1. Cho, Sang-Yeon and Thomas, Mikkel and Kim, Dae-Ik and Jokerst, Nan Marie and Brooke, Martin, Polymer waveguide optical interconnections on Si CMOS circuits, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (2002), pp. 161 -, Long Beach, CA, United States
   (last updated on 2007/04/16)

   Abstract:
   Optical interconnections, on foundry silicon complementary metal oxide semiconductors (CMOS) circuits using polymer optical waveguides, was demonstrated. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The channel in the fabricated waveguide was defined by reactive ion etching through silica hard mask. Results indicated that increase in the incident optical power into the optical waveguide resulted in increase in the mean of the bit stream samples.

   Keywords:
   CMOS integrated circuits;Semiconducting silicon;Optical waveguides;Organic polymers;Inductively coupled plasma;Reactive ion etching;Spin coating;Cladding (coating);Masks;Silica;Helium neon lasers;Photodetectors;Analog to digital conversion;