- Liu, Jian and Martin, David T. and Nishida, Toshikazu and Cattafesta, III, Louis N. and Sheplak, Mark and Mann, Brian P., Harmonic balance Nonlinear identification of a capacitive dual-backplate MEMS microphone,
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 17 no. 3
pp. 698-708 [doi] .
(last updated on 2011/12/09)
This paper describes the application of a nonlinear identification method to extract model parameters from the steady-state response of a capacitive dual-backplate microelectromechanical systems microphone. The microphone is modeled as a single-degree-of-freedom second-order system with both electrostatic and mechanical nonlinearities. A harmonic balance approach is applied to the nonlinear governing equation to obtain a set of algebraic equations that relate the unknown system parameters to the steady-state response of the microphone. Numerical simulations of the governing equation are also performed, using theoretical system parameters, to validate the accuracy of the harmonic balance solution for a weakly nonlinear microphone system with low damping. Finally, the microphone is experimentally characterized by extracting the system parameters from the response amplitude and phase relationships of the experimental data.