- LOPEZ, GP and RATNER, BD, SUBSTRATE-TEMPERATURE EFFECTS ON FILM CHEMISTRY IN PLASMA DEPOSITION OF ORGANICS .1. NONPOLYMERIZABLE PRECURSORS,
LANGMUIR, vol. 7 no. 4
pp. 766--773 .
(last updated on 2010/02/08)
The effect of reduced substrate temperature on the chemistry of radio frequency (rf) plasma-deposited organic films was examined. The scope of this study was confined to rf plasmas formed by the ionization of organic liquid vapors (acetone and hexafluoro-2-propanol) that are not readily polymerizable by conventional organic chemical reactions. Film chemistries and thicknesses were analyzed primarily by X-ray photoelectron spectroscopy. For both compounds, films deposited at low substrate temperatures show chemical features (atomic composition and functional groups) more closely related to the precursor vapors than films deposited at high temperatures, indicating a reduction in precursor fragmentation at low substrate temperatures. The proposed mechanism for the chemical effects observed involves the increased adsorption or condensation of nonfragmented organic vapors at low substrate temperatures.