- Natarajan, Srividya and Parker, Charles B. and Glass, Jeffrey T. and Piascik, Jeffrey R. and Gilchrist, Kristin H. and Bower, Christopher A. and Stoner, Brian R., High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices,
Applied Physics Letters, vol. 92 no. 22
(June, 2008) .
(last updated on 2012/07/09)
We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 mu m thick silicon dioxide layer to the device. The device is fabricated using microelectromechanical systems fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. This is the highest value reported for carbon nanotube-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications. (c) 2008 American Institute of Physics.