- Evans, R. D. and Bentley, J. and More, K. L. and Doll, G. L. and Glass, J. T., Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen,
Journal of Applied Physics, vol. 96 no. 1
pp. 273--279 [1.1760232] .
(last updated on 2012/07/09)
The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.
Thin films;Silicon carbide;Chemical bonds;Electron energy levels;Sputtering;Hardness;Compressive stress;Photoluminescence;Refractive index;Transmission electron microscopy;Electron diffraction;