- Bower, Christopher A. and Gilchrist, Kristin H. and Piascik, Jeffrey R. and Stoner, Brian R. and Natarajan, Srividya and Parker, Charles B. and Wolter, Scott D. and Glass, Jeffrey T., On-chip electron-impact ion source using carbon nanotube field emitters,
Applied Physics Letters, vol. 90 no. 12
pp. 124102 - [1.2715457] .
(last updated on 2012/07/09)
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American Institute of Physics.
Carbon nanotubes;Cathodes;Electric currents;Electron sources;Impact ionization;Microprocessor chips;