- Geis, M. W. and Smith, H. I. and Argoitia, A. and Angus, J. and Ma, G. H. M. and Glass, J. T. and Butler, J. and Robinson, C. J. and Pryor, R., LARGE-AREA MOSAIC DIAMOND FILMS APPROACHING SINGLE-CRYSTAL QUALITY,
Applied Physics Letters, vol. 58 no. 22
pp. 2485--2487 .
(last updated on 2012/07/09)
The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals in the structures, and chemical vapor deposition overgrowth of the diamond seeds to form a continuous film. The film comprises approximately 100-mu-m single crystals, which are separated by low-angle grain boundaries of a few degrees or less. We believe that these low-angle grain boundaries will not affect the electrical properties of majority-carrier devices.
CVD coatings;diamond;etching;grain boundaries;mosaic structure (microstructure);