- Williams, B.E. and Kong, H.S. and Glass, J.T., Electron microscopy of vapor phase deposited diamond,
Journal of Materials Research, vol. 5 no. 4
pp. 801 - 810 .
(last updated on 2007/04/17)
Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by electron microscopy. Previously reported transmission electron microscopy (TEM) of the films has shown that the majority of diamond crystals have a high defect density comprised of 111 twins, 111 stacking faults, and dislocations. In this study, high resolution electron microscopy (HREM) has been utilized to lattice image individual defects in the polycrystalline films. Interpretation of the images from these defects is not trivial and reported image simulations have been utilized to understand these defects. Fivefold multiply twinned particles have also been examined and it was found that the 7.5° misfit present in such particles has been accommodated at the twin boundaries rather than the elastic deformation. This creates a twin boundary coincident with a low angle grain boundary which has been termed a tilted twin boundary. The density of defects in these particles is generally high; however, a reduction in the defect density near the twin boundaries was observed. This reduction is significant because if its origin can be determined, this information may be useful in producing higher quality diamond films.
Films - Diamond;Microscopic Examination - Transmission Electron Microscopy;