- Tice, W.K. and Tan, T.Y., Nucleation of CuSi precipitate colonies in oxygen-rich silicon,
Appl. Phys. Lett. (USA), vol. 28 no. 9
pp. 564 - 5 [1.88825] .
(last updated on 2007/04/10)
TEM techniques are used in a study of the nucleation of CuSi precipitate colonies in oxygen-rich (2×1017-2×1018 oxygen atoms/cm3) silicon. Prismatic dislocation loops associated with precipitates in the oxygen-rich silicon act as nucleation sites for precipitation of CuSi as star-shaped colonies
crystal impurities;dislocations;electron microscope examination of materials;precipitation;silicon;