- Tan, T.Y. and Tsu, R. and Ho, P.S. and Tu, K.N., Crystallization of amorphous silicides by energy beam annealing,
AIP Conf. Proc. (USA) no. 50
pp. 533 - 8 .
(last updated on 2007/04/10)
Co-evaporated amorphous WSi2, NiSi2, Pd4Si and Pd2Si were readily crystallized by e-beam annealing via solid-state phase transformation. Tetragonal WSi2, CaF2 type NiSi2 and metastable phase II Pd4Si are identified. When annealed by a laser beam, Pd-rich materials may melt and solidify back into the amorphous state due to fast quenching effect
amorphous state;annealing;crystallisation;electron beam effects;laser beam effects;nickel compounds;palladium compounds;tungsten compounds;