Publications [#280296] of David J. Brady
- Ramachandran, S; Brady, DJ; Bishop, SG, Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses,
Conference Proceedings Lasers and Electro Optics Society Annual Meeting Leos, vol. 1
pp. 284-285, Boston, MA, USA [LEOS.1996.565242]
(last updated on 2019/11/18)
The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As 2 S 3 (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.
Optical glass;Laser recording;Light absorption;Photolithography;Integrated circuit manufacture;Laser beam effects;Gas lasers;Expansion;