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Publications [#281168] of Peter K. Haff
Papers Published
- Haff, PK, A model for surface layer composition changes in sputtered alloys and compounds,
Applied Physics Letters, vol. 31 no. 4
(December, 1977),
pp. 259-260, AIP Publishing, ISSN 0003-6951 [1.89652], [doi]
(last updated on 2023/06/01)
Abstract: Under the assumption that extracted beam energy is quickly shared among secondary cascade members of all masses, we present a model which accounts quantitatively for recently observed equilibrium surface enrichments in heavy atoms following ion bombardment of alloys and compounds. Assuming strong radiation-driven diffusion, effects of which are directly observed, and given the time required to reach equilibrium, we can calculate the thickness Δx of the enriched layer. Alternatively, knowing Δx, a calculation of the equilibration time constant is possible.
Keywords: sputtering;surface structure;
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