Department of Mathematics
 Search | Help | Login | pdf version | printable version

Math @ Duke



Publications [#244253] of Thomas P. Witelski


Papers Published

  1. Borucki, LJ; Witelski, T; Please, C; Kramer, PR; Schwendeman, D, A theory of pad conditioning for chemical-mechanical polishing, Journal of Engineering Mathematics, vol. 50 no. 1 (September, 2004), pp. 1-24 [issues.aspx], [doi]
    (last updated on 2018/10/16)

    Statistical models are presented to describe the evolution of the surface roughness of polishing pads during the pad-conditioning process in chemical-mechanical polishing. The models describe the evolution of the surface-height probability-density function of solid pads during fixed height or fixed cut-rate conditioning. An integral equation is derived for the effect of conditioning on a foamed pad in terms of a model for a solid pad. The models that combine wear and conditioning are then discussed for both solid and foamed pads. Models include the dependence of the surface roughness on the shape and density of the cutting tips used in the conditioner and on other operating parameters. Good agreement is found between the model, Monte Carlo simulations and with experimental data. © 2004 Kluwer Academic Publishers.
ph: 919.660.2800
fax: 919.660.2821

Mathematics Department
Duke University, Box 90320
Durham, NC 27708-0320