Papers Published
- Guo, J; Brady, D, Fabrication of thin-film micropolarizer arrays for visible imaging polarimetry,
Applied Optics, vol. 39 no. 10
(April, 2000),
pp. 1486-1492, The Optical Society [doi] .
(last updated on 2023/06/01)Abstract:
We describe a microfabrication process for fabricating micropolarizer devices with polarization thin film. The polarization film is less than a 0.5 µm thick and can have a polarization extinction ratio of ∼330 in the visible wavelength range. A single-state micropolarizer array with polarizing pixels as small as 5 µm × 5 µm has been fabricated. A multilayer spatially multiplexed three-state micropolarizer line array with a 14.4-µm resolution has also been fabricated for visible imaging polarimetry application. © 2000 Optical Society of America.Keywords:
Light polarization;Thin film devices;Optical films;Multilayers;Image sensors;Optical resolving power;Polarimeters;CMOS integrated circuits;