Papers Published

1. Balberg, M. and Barbastathis, G. and Brady, D.J. and Choi, Bo. K. and Liu, Chang, Holographic 3D imaging of microstructures, Proceedings of SPIE - The International Society for Optical Engineering, vol. 3801 (1999), pp. 202 - 207 [12.363933] .
   (last updated on 2007/04/11)

   Abstract:
   A volume holographic matched filter is used for three-dimensional imaging of silicon microstructures. The filter is designed by recording a hologram that is matched to the object depth, allowing confocal imaging of the structure. Confocal imaging of micro devices provides the capability to image the performance of the device, which is not possible in scanning-electron-microscopes (SEM). A matched holographic filter can also provide more information about the device than regular confocal imaging. We present a scanned image of a silicon wafer with micro-fabricated trenches.

   Keywords:
   Imaging systems;Three dimensional;Holograms;Scanning electron microscopy;Microscopes;Silicon wafers;