Papers Accepted

1. Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R, Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect, Conference on Optical Fiber Communication, Technical Digest Series, vol. 2003-January (January, 2003), pp. PD36.1-PD36.3, IEEE [doi] .
   (last updated on 2025/04/18)

   Abstract:
   We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000 G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss nonblocking 1000x1000-port optical cross-connect switch.