Papers Published
- Massoud, H.Z. and Shiely, J.P. and Shanware, A., Self-consistent MOSFET tunneling simulations-trends in the gate and substrate currents and the drain-current turnaround effect with oxide scaling,
Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics. Symposium
(1999),
pp. 227 - 39 .
(last updated on 2007/04/15)Abstract:
This paper discusses the simulation needs of deep-submicron MOSFETs beyond the 100 nm technology generation where the tunneling of carriers through the gate dielectric will become a vital issue in device design, optimization, and characterization. We present simulation results of Tunnel-PISCES, a MOSFET device simulator where tunneling in the gate dielectric is implemented in a self-consistent manner with the device equations in the substrate. Simulation results of trends in the gate, substrate, and drain currents with oxide scaling are presented. The drain-current turnaround effect is explained by considering the role of the voltage drop across the polysilicon gate resistance in determining the device gate tunneling conditionsKeywords:
elemental semiconductors;MOSFET;semiconductor device models;silicon;tunnelling;