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Papers Published
- Thomsen, Axel and Brooke, Martin A., A floating-gate MOSFET with tunneling injector fabricated using a standard double-polysilicon CMOS process,
IEEE Electron Device Letters, vol. 12 no. 3
(1991),
pp. 111 - 113 [55.75728] .
(last updated on 2007/04/11)Abstract:
A floating-gate MOSFET which is programmable in both directions by Fowler-Nordheim tunneling and is fabricated using an inexpensive standard 2-μm double-polysilicon CMOS technology is discussed. Tunneling occurs at a crossover of polysilicon 1 with polysilicon 2. Device layout and basic device characteristics are presented, and recommendations for efficient programming are given. This is the first floating-gate FET with a tunneling injector fabricated in standard technology that has close to symmetric programming characteristics for both charging and discharging of the gate.Keywords:
Electrons - Tunneling;Data Storage, Semiconductor - Fabrication;Data Storage, Digital - PROM;