Papers Published
- Srinivasan, Vijay and Jog, Anand and Fair, Richard B., Scalable macromodels for microelectromechanical systems,
2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
(2001),
pp. 72 - 75 .
(last updated on 2007/04/17)Abstract:
A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.Keywords:
Computer aided design;CMOS integrated circuits;Capacitance;Electric potential;Finite volume method;Computational methods;Mathematical models;