Publications by Richard B. Fair.
Papers Published
- Fair, R.B. and Weber, G.R., Relationship between resistivity and total arsenic concentration in heavily doped n- and p-type silicon,
J. Appl. Phys. (USA), vol. 44 no. 1
(1973),
pp. 280 - 2 .
(last updated on 2007/04/17)Abstract:
The authors have proposed a theory for explaining the existence of nonelectrically active As in Si. This theory is applied to derive total As doping vs bulk resistivity curves as a function of diffusion temperature. Experimental data are presented to verify the theoretical curvesKeywords:
arsenic;diffusion in solids;electrical conductivity of solids;impurity electron states and effects;silicon;