Papers Published

1. Impurity Diffusion and Gettering in Silicon Symposium, edited by Fair, R.B.;Pearce, C.W.;Washburn, J.; (1985), pp. xiii+284 - .
   (last updated on 2007/04/17)

   Abstract:
   The following topics were dealt with: impurity complexing, precipitation and gettering; impurity diffusion processes; properties of oxygen in silicon. Abstracts of individual papers can be found under the relevant classification codes in this or other issues

   Keywords:
   diffusion in solids;elemental semiconductors;getters;impurities;precipitation;semiconductor technology;silicon;