Publications [#63605] of April S. Brown

Papers Published

1. Carter-Coman, Carrie and Bicknell-Tassius, Robert and Benz, Rudolph G. and Brown, April S. and Jokerst, Nan Marie, Analysis of GaAs substrate removal etching with citric acid:H₂O₂ and NH₄OH:H₂O₂ for application to compliant substrates, Journal of the Electrochemical Society, vol. 144 no. 2 (1997), pp. 29-31 -
   (last updated on 2007/04/14)

   Abstract:
   New properties associated with selective substrate removal have been observed in the application of this technique to GaAs thin film compliant substrates. Citric acid-and NH₄OH-based etches are used to selectively etch the GaAs substrate and stop on an AlAs layer. The AlAs stop-etch layer is transformed into a layer that is almost twice as thick as the original layer, mismatched to the remaining GaAs epilayer, and has a refractive index around 2.0. Replacement of the single AlAs stop etch layer with multiple thin AlGaAs stop etch layers is proposed to alleviate this problem.

   Keywords:
   Semiconducting gallium arsenide;Substrates;Removal;Thin films;Acids;Semiconducting aluminum compounds;Refractive index;