Publications [#66414] of Nan M. Jokerst

Papers Published

1. Sang-Yeon Cho and Jokerst, N.M., Polymer waveguide optical interconnections for electrical interconnection substrates, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Conference Edition (IEEE Cat. No.02CH37337), vol. vol.1 (2002), pp. 161 - 2, Long Beach, CA, USA [CLEO.2002.1033563]
   (last updated on 2007/04/16)

   Abstract:
   Summary form only given. An integration process and measured result of a fully embedded thin film MSM photodetector (PD) fabricated from InGaAs which is embedded in a polymer optical waveguide which is deposited on a Si substrate is presented, thus realizing the goal of three separate, independently optimized materials for the waveguide, substrate, and PD. The dark current and photocurrent produced by the evanescent field coupling from the optical waveguide into the embedded MSM PD are shown Measured dark and photocurrent were 60.6 nA and 1.2 μA at 5 V, respectively. The coupling efficiency was estimated based on the measured responsivity and photocurrent of the thin film MSM PD and the launched optical power was calculated using a mode matching approach through FIMMWAVE software from Photon Design. The estimated coupling efficacy from the input optical waveguide to the embedded MSM PD was 71.74%

   Keywords:
   dark conductivity;integrated circuit interconnections;integrated optoelectronics;metal-semiconductor-metal structures;optical interconnections;optical polymers;optical waveguides;photodetectors;