Publications [#66453] of Nan M. Jokerst

Papers Published

1. Wilkinson, Scott T. and Kim, Young W. and Jokerst, Nan M. and Allen, Mark G., Integration of thin film optoelectronic devices onto micromachined movable platforms, IEEE Photonics Technology Letters, vol. 6 no. 9 (1994), pp. 1115 - 1118 [68.324685]
   (last updated on 2007/04/16)

   Abstract:
   The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed.

   Keywords:
   Optical fiber coupling;Fiber optic sensors;Thin film devices;Micromachining;Substrates;Semiconducting aluminum compounds;Semiconducting gallium arsenide;Detector circuits;Actuators;Semiconductor device structures;Polyimides;