Publications [#66486] of Nan M. Jokerst

Papers Published

1. Cho, Sang-Yeon and Jokerst, Nan Marie, Polymer waveguide optical interconnections for electrical interconnection substrates, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (2002), pp. 161 - 162, Long Beach, CA, United States
   (last updated on 2007/04/16)

   Abstract:
   Integration process and measured result of a fully embedded thin film metal-semiconductor-metal (MSM) photodetector (PD) fabricated from InGaAs were presented. The channel in the fabricated waveguide was defined by reactive ion etching. The optical signal was launched into the optical waveguide by an optical fiber connected to a commercial laser. Measured dark and photocurrent were 60.6 nA and 1.2 μA at 5 V, and estimated coupling efficiency from the input optical waveguide to the embedded MSM PD was 71.74%.

   Keywords:
   Optical waveguides;Polymers;Thin films;Photodetectors;Semiconducting indium gallium arsenide;Reactive ion etching;Optical fibers;Lasers;Photocurrents;