Publications [#67682] of Richard B. Fair

Papers Published

1. Fair, R.B., A self-consistent method for estimating non-step junction doping profiles from capacitance-voltage measurements, J. Electrochem. Soc. (USA), vol. 118 no. 6 (1971), pp. 971 - 5
   (last updated on 2007/04/17)

   Abstract:
   The use of the step-junction approximation for calculating the net doping density from C-V measurement data can lead to serious errors in the resulting profiles for sequentially diffused structures. Non-step junction behavior can be accounted for if the equation for the effective doping density is multiplied by a correction factor. Two approximate methods of estimating this correction factor are discussed in which the net ionized impurity density on the high side of the junction is assumed to change either linearly or exponentially with incremental changes in depletion layer depth. For both of these approximations, the net ionized impurity density on the low side is assumed to change parabolically. These net distributions of charge, which are iteratively determined in a self-consistent fashion, yield the best approximations for this functional form of the profile, according to the C-V measurements made on the junction

   Keywords:
   impurity electron states and effects;semiconductor junctions;semiconductors;