Publications [#67637] of Richard B. Fair

Papers Published

1. Fair, Richard B. and Rose, John E., PROCESS SIMULATION OF SUBMICRON TECHNOLOGIES., Semiconductor International, vol. 10 no. 13 (1987), pp. 72 - 75
   (last updated on 2007/04/17)

   Abstract:
   The development of advanced computer-aided engineering and design (CAE/CAD) tools has greatly enhanced the ability of U. S. manufacturers to quickly design a product. Process development is an engineering-intensive effort, perpaps even more so than the IC design effort. Hundreds of variables must be tightly controlled, each of which can have a profound impact on final device performance. Results of a recent effort to address the deficiencies and lack of sophistication in available process models and simulation software are considered. This effort is embodied in the PREDICT program (Process Estimator for the Design of Integrated Circuit Technologies).

   Keywords:
   COMPUTER PROGRAMMING - Applications;COMPUTER SIMULATION;