Publications [#67674] of Richard B. Fair

Papers Published

1. Rogers, B. and Fair, R.B. and Dyson, W. and Rozgony, G.A., Computer simulation of oxygen precipitation and denuded zone formation, VLSI Science and Technology-1984. Proceedings of the Second International Symposium on Very Large Scale Integration Science and Technology. Materials for High Speed/High Density Applications (1984), pp. 74 - 84, Cincinnati, OH, USA
   (last updated on 2007/04/17)

   Abstract:
   A computer model of oxygen-precipitate nucleation, growth and dissolution, and oxygen outdiffusion from a silicon wafer surface has been developed. The model assumes homogeneous nucleation and uses nucleation and growth expressions available in the literature. To simulate oxygen outdiffusion, thermally activated boundary conditions are used at the wafer surface. The thermal history of the as-grown ingot is considered in predicting precipitate densities and depths of denuded zones. The model provides insight into the importance of homogeneous nucleation and thermal history in the precipitation process and provides a framework for the incorporation of heterogeneous effects

   Keywords:
   diffusion in solids;digital simulation;elemental semiconductors;nucleation;oxygen;precipitation;silicon;