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| Publications [#67711] of Richard B. Fair
Papers Published
- Fair, R.B. and Weber, G.R., Relationship between resistivity and total arsenic concentration in heavily doped n- and p-type silicon,
J. Appl. Phys. (USA), vol. 44 no. 1
(1973),
pp. 280 - 2
(last updated on 2007/04/17)
Abstract: The authors have proposed a theory for explaining the existence of nonelectrically active As in Si. This theory is applied to derive total As doping vs bulk resistivity curves as a function of diffusion temperature. Experimental data are presented to verify the theoretical curves
Keywords: arsenic;diffusion in solids;electrical conductivity of solids;impurity electron states and effects;silicon;
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