Publications [#67725] of Richard B. Fair

Papers Published

1. Pamula, Vamsee K. and Jog, Anand and Fair, Richard B., Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams, 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 (2001), pp. 410 - 413, Hilton Head Island, SC, United States
   (last updated on 2007/04/17)

   Abstract:
   We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPs process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantilever deflections are compared to finite element simulations performed with MEMCAD [trademark] which show an excellent match for a Young's modulus of 78GPa and a Poisson's ratio of 0.35.

   Keywords:
   Gold;Microelectromechanical devices;Deposition;Elastic moduli;Cantilever beams;Position measurement;Poisson ratio;Actuators;Computer aided design;Finite element method;Computer simulation;