Publications [#67748] of Richard B. Fair

Papers Published

1. Fair, R.B., Profile estimation of high-concentration arsenic diffusions in arsenic, J. Appl. Phys. (USA), vol. 43 no. 3 (1972), pp. 1278 - 80
   (last updated on 2007/04/17)

   Abstract:
   In order to facilitate surface concentration estimation for arsenic diffusion, a simple expression has been derived which is dependent only upon the junction depth x_J and the sheet resistance R_s:C_s=1.56×10¹⁷/x_JR_s. This equation was derived from experimental mobility data and a polynomial approximation to the solution of the arsenic diffusion equation. Available data on diffusions carried out from five different kinds of arsenic sources indicate that this derived equation for C_s is accurate to within 15% for C_s≳ni

   Keywords:
   arsenic;crystal impurities;diffusion in solids;silicon;