Publications [#67753] of Richard B. Fair

Papers Published

1. IMPURITY DIFFUSION AND GETTERING IN SILICON., edited by Fair, Richard B.;Pearce, Charles W.;Washburn, Jack;, Materials Research Society Symposia Proceedings, vol. 36 (1985), pp. 284 -, Boston, MA, USA
   (last updated on 2007/04/17)

   Abstract:
   This conference symposium volume 36 contains 39 papers arranged in 3 sections. Topics presented includes: Impurity behavior, impurity diffusion and oxygen in silicon. Precipitation and complexing of metals in silicon as well as their electrical activity, solubility and diffusivity were discussed. Analytical techniques for impurity mapping or detection were compared and the importance of using several analytical tools were stressed. Gettering processes were also discussed. Evidence was presented that shows gettering of Ni, Au and Fe to be governed by the availability of self interstitials in silicon. Methods of gettering metallic impurities were presented such as deposited films, implantation damage and epitaxial misfit dislocations. The role of point defects in silicon and their influence on diffusion, extrinsic defect growth and gettering was presented.

   Keywords:
   VACUUM TECHNOLOGY - Getters;SEMICONDUCTOR MATERIALS - Diffusion;CRYSTALS - Dislocations;INTEGRATED CIRCUIT MANUFACTURE;OXYGEN - Precipitation;