Publications [#64740] of Hisham Z. Massoud

Papers Published

1. Goodwin-Johansson, S.H. and Subrahmanyan, R. and Floyd, C.E. and Massoud, H.Z., Two-dimensional impurity profiling with emission computed tomography techniques, IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst. (USA), vol. 8 no. 4 (1989), pp. 323 - 35 [43.29587]
   (last updated on 2007/04/15)

   Abstract:
   A technique for the determination of two-dimensional impurity profiles in silicon using methods for emission computed tomography is presented. Several one-dimensional impurity profiles obtained for different directions through the sample are used to reconstruct the two-dimensional profile. A simulation study of the experiment is described, and effects of various experimental and reconstruction parameters are discussed. Reconstructions of an area of 4 μm×4 μm from thirteen one-dimensional measurements, with a resolution of 1000 Å, are numerically possible

   Keywords:
   computerised tomography;diffusion in solids;doping profiles;electronic engineering computing;elemental semiconductors;impurity distribution;physics computing;semiconductor doping;silicon;